037. 什麼是FFU ？？

 

keywords: FFU. Fan Filter

Reference：202-080998-001, Rev. F Setting Up and Calibrating the Fan Filter Unit

1. 什麼是FFU ？？

答： Fan Filter Unit

2. 在機台哪裡？

答：FI 內，ATM robot 上方，如圖。

Location of FFU

3. FFU 功能是什麼？

答：過濾空氣，並為持 FI 內為正壓，避免髒空氣進入。

4. 怎麼偵測 FFU 是否正常動作？

答：FFU有風扇轉速，3LP 設定在2200rpm（控制器刻度在8.5），4LP設定大約1520rpm。

        另外，在FFU controller 內有兩個壓力開關（pressure sensor)，當內部壓力變低

        就會 trigger 機台alarm，迅速把FOUP門關起來，保護 wafer。

5. 怎麼調校FFU？

1）Locate the fan speed adjustment knob located on the right side of the FFU.

2）For the 3LPM system, set the speed control knob on the FFU to 8.5 and set the switch to the manual position. With the knob set at this position, the average airflow velocity is approximately 80 fpm at the upper boundary of the mini-environment, and approximately 60 fpm at the lower boundary of the mini-environment. See Figure 3 and Figure 4 for mini-environment details.

PS. fpm = ft/min

3）For the 3LPM system, verify that the adjustable louver is set to 50 percent open. See Figure 2. If it is not, perform the next step.

4）Loosen the 6 screws that hold the adjustable louver in place. Adjust all the bottom vents to 50 percent slot open. Tighten the screws after you make the adjustment.