036. datalog viewer | platform datalog setup

 

Diagnose Trace

keywords: datalog viewer | platform datalog setup

1. 怎麼手動測試機台，並留下datalog?
答：Diagnose trace.  Diagnose\Platform Diag Trace Window，如上圖

2. 怎麼設定要確認的senor / indicator ?

答：Go to the Diagnose\Platform Diag Setup window.

3. 練習，以設定Backside He pressure 為例，如下圖

1. Set up a diagnostic trace specification with the following variables: 

   − HeBacksideFlow_AI
   

   − HeBacksidePressure_AI
   − ChamberManometerAdjustedPressure
   − ProcessManometerAdjustedPressure
   
   
   註：AI 是什麼意思：（analog input, 類比訊號輸入，UI 接收到的訊號）

Diag Setup Window