EP008.Replace He regulator

 

keywords: B/H, backside helium

Replace Helium regulator （壓力調節閥）

1.1  close He source

1.2  test He loop Leakback (LR)

1.3  replace regulator

1.4  test He loop Leakback again

1.5  open source

1.6  production season check whether the problem is solved.