2023年6月29日 星期四

EP024. MyLam|帳號申請|提升對機器敏銳度的好資源

 


MyLam / Product Explorer

參考資料:myLam https://mylam.lamresearch.com


MyLam|帳號申請|提升對機器敏銳度的好資源

沒有人天生就擁有機器的修復技能,

這需要有參考資料,

只需要申請帳號,就可以享用這些資源

帳號申請步驟如下

MyLam 帳號申請步驟


申請過,就可以盡情探索Lam 產品手冊






EP023 purge LP與LP(Load port)差別

 

Load port


purge LPLP(Load port)差別??

keywords: purge LP,

項目

Purge LP

LP

全名稱

Purge Load port

Load port

製造商

Local vendor()

TDK ()

功能

降低FOUP內部濕度

1.     讀取FOUP ID

2.     開關FOUP

機台位置

LP蓋板前那片結構

3F機台前方FOUP 放置區

基本作動

1        Load purge

1.1       Gas flow

1.2       Humidity

1.3       Inlet pressure 

1.4       Outlet pressure

1.5       Temperature

2        Continue purge 

2.1       Gas flow

2.2       Humidity

2.3       Inlet pressure 

2.4       Outlet pressure

2.5       temperature

3        Unload purge

3.1       Gas flow

3.2       Humidity

3.3       Inlet pressure 

3.4       Outlet pressure

3.5       temperature

1.     讀取FOUP ID (RFID)

2.     Clamp

3.     Dock in (shuttle in)

4.     Vacuum on

5.     Latch open

6.     Door open

7.     Door down

8.     ------------ 以上open door

9.     Door up

10.  Door close

11.  Latch off

12.  Vacuum off

13.  Dock out (shuttle out)

14.  Clamp up

15.  Clamp backward

16.  Clamp down

17.  -----------  9-16 close door

好發FDC 

spec

1.     Outlet pressure 

2.     Gas flow 

NA

好發之Alarm

NA

Command reply error

2.        Dummy replacement(宿疾)

3.        指撥開關(對照alarm)




Load port 的位置



2023年6月28日 星期三

EP022. Endpoint detection: OES怎麼設定?什麼是IB 訊號?

 


Keywords: spectrum, 光譜, OES, IB7

參考資料:202-037878-001, Rev. G, Endpoint Detection


Endpoint Detection

用中文簡單說:質譜儀能夠提供高精度的氣體分析結果,這使得在蝕刻過程中氣體相變化的特定時刻被準確地檢測。當特定氣體成分的峰值或變化率達到預定值時,可以判定蝕刻終點已經達到。

Every step within a wafer-processing recipe has a number of user-defined parameters for controlling the process of endpoint detection. In order to define a step as an endpoint step, you must select the parameter variable named Step Type for that step as EndPT. Otherwise, all optical emission spectra (OES) parameters are processed but no endpoint detection is performed.

There are four major groups of user-defined parameters used by the OES system to perform an endpoint detection test. These four parameter groups are integration bands, basis functions, filters, and algorithms. All these four parameters are defined in the Editors\Endpoint Param window. See Figure 7.


OES 設定的主要參數

1. Integration Bands (IB訊號)

用中文簡單說:就是常聽到的 IB訊號,
軟體可藉由設定波長、波寛,設定8組訊號,IB1, IB2, IB3, IB4~IB8.
IB訊號訊定範圍:from 200 nm to 900 nm
IB訊號設定,舉例"波長 256 nm,波寬 6 for IB1,在 253 nm to 259 nm 這區域收為IB1訊號。

An integration band (IB) defines a contiguous wavelength band in the spectrograph. The value of the IB is the sum of the spectrographic intensity in the defined contiguous wavelength band.

An IB is defined by providing a wavelength position and a width band centered at the selected wavelength. You can define up to eight IBs (IB1, IB2, and so forth).

Once an IB is defined, its value can then be used by the basic function. The valid range of the wavelength is from 200 nm to 900 nm.

For example, if a wavelength of 256 nm is chosen and the width is 6 for IB1, then the value of IB1is obtained by adding all the intensity values from the contiguous band of 253 nm to 259 nm.


2. Basis Functions

用中文簡單說看出此步驟偵測哪個IB訊號,或代數計算之設定

A basis function (BF) combines one or more IBs in a simple algebraic equation. The value of a basis function (endpoint signal) at each sampling interval is used as basis for endpoint detection.

The OES system provides several predefined algebraic equations for selection. In addition, you can also specify user-defined equations. The predefined algebraic equations are:

  • IB1

  • IB2

  • IB1 – IB2

  • IB1 / IB2

  • User defined

    An example of a user-defined basic function is as follows:

0.5 * IB1 + 0.9 * IB2


3. Filters

用中文簡單說不常用,再找專家研究

Filters are used to smooth out the incoming data and to reduce noise. You can apply the filters individually to integration bands and/or basis functions.

Fourteen different types of filters are defined in the current version of OES system:


4. Algorithms

用中文簡單說:該步驟偵測End Point 的演算法,偵測IB訊號變化、波峰、波谷等等,達到偵測點後,結束此EndPt step,進入下一步驟。大致上演算法包含三階段:經過幾後後開始偵測(Delay time), IB 訊號趨於穩定( Normalization Time), and 基於Endpoint設定條件(Endpoint Detecting).

For each endpoint step, select an algorithm for the OES system to use for detecting the occurrence of endpoint. There are ten pre-defined algorithms for selection in the current OES system—Value Change,Percent Change, Value Slope, Percent Slope, Direction Detection, Interferometer, Peak and Valley, Twin Peaks, Percent Slope Change, and WAC Detection.

In general, the process of finding the endpoint involves three stages: Delay Time, Normalization Time, and Endpoint Detecting.


5. OES 設定怎麼點出來?

用中文簡單說:如下圖步驟。

怎麼確認OES設定




EP021. 什麼是 MAX EP alarm??

 


Keywords: OES, Endpoint, EP


什麼是 MAX EP alarm?? 

答:Maximum End point alarm (設定時間內無法偵測到蝕刻終點。)

還不能瞭解就要先瞭解以下幾個東西:

1.  簡述EPD之功用

答:偵測蝕刻終點;End point detector利用波長偵測蝕刻終點


2. 在機台上哪個是 End point detector (光諎原理) 

答: OES (spectrometers used for optical emission spectroscopy) 

         用於光學發射光譜的光譜儀


OES簡介



3.  Recipe step type 設定在哪?

答:Recipe window/ recipe / Step type 為 EndPt

1.Stable各參數都符合soft tolerance才會進入下一步,否則就會出現stable fail alarm.
2.Time
process 時間設定此step的時間,以單位
3.EndPtendpoint,蝕刻結點,藉由OES設備,偵測光譜訊號來結束這step

4. Recipe step process time 設定在哪?

答:Recipe window/ recipe / Process time (以秒為單位)


Recipe 參數設定


回到問題點,什麼是MAX EP ALARM,舉例

確認 Recipe 設定,在 EndPt step,
在max process time 65秒內沒達到設定值,
UI 就會亮紅燈 ,秀出MAX EP ALARM @stepX  65s

StepType & process time 設定


處理步驟:

此時我們要檢查 OES 訊號是否正常、
RF POWER是否正常輸出、
Process pressure 是否穩定。
這些都正常,就請製程補蝕刻,完成後續的步驟。




2023年6月27日 星期二

EP020. 兩張圖帶你看懂「壓力」的物理意義

 

Keyword: pressure, manometer, 壓力


1. 什麼是壓力?

壓力」是作用在物體表面上垂直做功時每單位面積力的大小,常用的單位換算有 mTorr、Kg/cm2、Bar(Pa)及 psi 等。 

2. 大氣壓:

在海平面上測得的空氣壓力約為 1 kg/cm2,其來源是大氣層中空氣的重量,因此又稱為大氣壓力,常以 atm 表示,1 kg/cm約等同於 1 大氣壓力(1 atm)。實際的大氣壓力則會隨著海拔高度、溫度及天氣等因素而有所變動。 

3. 絕對壓力及相對壓力:

絕對壓力的壓力值 =絕壓值,以絕對壓力為基準的壓力錶 =絕對壓力錶

ex. CM1, CM2, CM3
相對壓力的壓力值 =錶壓值,以相對壓力為基準的壓力錶 =相對壓力錶

ex. MFC transducer, He pressure gauge 等


圖解絕對壓力及相對壓力



帶著以上的概念,重新看一次機台用到的gauge 吧



No.

縮寫

全名

量測範圍

Interlock switch

如何應用?

1

CM1

Process manometer

0 - 100

mTorr

NA

Chamber 壓力小於100mT, CM1

2

CM2

Chamber

manometer

0 - 10

Torr

0.1V (100mT)

0.5V (500mT)

Chamber 壓力大於100mT, CM2

3

CM3

Foreline 

Manometer

0 - 10

Torr

1V   (1000mT)

10V (non use)

Foreline壓力大於1000mT, PV close

4

CM4

Backside helium UPC

0 - 50

psi

NA

pump down, 確認pressure & flow 零點

5

TM

Pressure gauge

0 – 760,000

mT

NA

VTM gauge

Normal 95mT

6

AL1
AL2

Hasting gauge

0 – 930,000

mTorr

NA

Airlock gauge




2023年6月26日 星期一

EP019.SSR 是什麼??

 



SSR 是什麼?

1.    名詞解釋:固態繼電器Solid State Relay縮寫SSR)是由半導體控制負載流經固態開關的無接點繼電器,在機台上,小電流控制大電流的裝置.

2.    機台應用:TCW/TCR等溫度百分比輸出(output value,就是藉由SSR 控制輸比百分比,來達到溫度控制。


SSR 在機台的什麼位置?

Chamber左側,AC enclosure 內,如圖



4P SSR 固態繼電器


4P SSR 接電圖